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  3. PFEIFFER IKR-361

PFEIFFER VACUUM IKR-361 Cathode Gauge Ikr

Ikr-361 Pfeiffer Vacuum Ikr 361 Cold Cathode Gauge

( Brand: Pfeiffer Vacuum ), ( Manufacturer Part Number: IKR-361 ), ( Part Type: Vacuum Gauge )

Review PFEIFFER VACUUM Ikr 361 Cold Cathode Gauge

The **Pfeiffer Vacuum IKR-361 (IKR 361) Cold Cathode Gauge** is a high-performance, compact, and versatile vacuum measurement instrument designed for precision applications in research, industrial processes, and semiconductor manufacturing. Engineered with Pfeiffer Vacuum s renowned expertise in vacuum technology, this gauge combines robust construction with advanced cold cathode technology to deliver accurate, reliable pressure readings across a broad range of applications. The IKR-361 operates on the principle of cold cathode ionization gauges, where a low-pressure gas ionizes under the influence of an electric field, generating a measurable ion current proportional to the gas density. This method ensures high sensitivity and stability, making it ideal for monitoring pressures from ultra-high vacuum (UHV) environments down to rough vacuum levels, typically spanning from **10 mbar** to **10 mbar**, depending on the gas type and operating conditions.

One of the standout features of the IKR-361 is its **modular and flexible design**, which allows for seamless integration into various vacuum systems. The gauge is equipped with a **PID (Process Interface Device) interface**, enabling direct connection to control systems, data loggers, or PLCs for automated monitoring and process optimization. Its compact form factor, measuring approximately **120 mm in diameter and 100 mm in length**, makes it suitable for installation in confined spaces without compromising performance. The gauge s **ceramic housing** ensures excellent thermal stability and resistance to temperature fluctuations, while its **stainless steel flange** (CF 40 or ISO-KF 40, depending on configuration) guarantees durability and compatibility with standard vacuum system components. The IKR-361 also incorporates a **built-in heater** for residual gas analysis (RGA) compatibility, allowing it to function effectively in systems where outgassing or gas composition analysis is critical.

Precision and reliability are at the core of the IKR-361 s design, with features such as **automatic zeroing and calibration routines** to minimize drift and ensure consistent readings over extended periods. The gauge s **digital display** provides real-time pressure data with high resolution, while its **RS-232 or digital output options** facilitate easy integration into automated workflows. Additionally, the IKR-361 is equipped with **overpressure protection** and **gas-specific calibration curves**, allowing users to achieve accurate measurements across a variety of gases, including noble gases, reactive gases, and hydrocarbons. This versatility makes it a preferred choice for applications in **semiconductor fabrication, thin-film deposition, surface science, and materials research**, where maintaining precise vacuum conditions is essential for process control and product quality.

Maintenance and usability are further enhanced by the IKR-361 s **user-friendly interface**, which includes intuitive controls for easy setup and operation. The gauge s **low power consumption** and **long-term stability** reduce operational costs and downtime, while its **modular construction** allows for easy replacement of components, such as the cathode or anode, in the event of wear or damage. Pfeiffer Vacuum s commitment to quality is evident in the IKR-361 s **calibration traceability** and **compliance with international standards**, ensuring that users can trust the gauge s readings for critical applications. Whether deployed in a laboratory setting for scientific research or in an industrial environment for high-precision manufacturing, the IKR-361 stands as a dependable and high-performance solution for vacuum measurement, embodying the fusion of innovation and engineering excellence that defines Pfeiffer Vacuum s legacy in the field.

**Pros and Cons of buying a Pfeiffer VACUUMS IKR-361 (Inverted Cathode Gauge)**

### **Pros**

1. **High Accuracy and Precision** The IKR-361 is a cold cathode gauge known for its reliable pressure measurements in the ultra-high vacuum (UHV) and high vacuum (HV) ranges, typically from 10 -6 to 10 -12 mbar. Its inverted cathode design reduces ion bombardment on the anode, improving long-term stability and accuracy.

2. **Wide Pressure Range** The gauge covers a broad spectrum of pressures, making it versatile for applications in thin-film deposition, semiconductor manufacturing, surface science, and other vacuum-related processes where precise control is critical.

3. **Durability and Longevity** Cold cathode gauges are generally robust and have fewer moving parts compared to some other types of vacuum gauges. The IKR-361 is designed for extended use in demanding environments, reducing the need for frequent replacements or recalibrations.

4. **Compatibility with Pfeiffer s Ecosystem** If you already use other Pfeiffer vacuum components (e.g., turbopumps, roughing pumps, or controllers), the IKR-361 integrates seamlessly with Pfeiffer s software and hardware solutions, simplifying system setup and maintenance.

5. **Low Maintenance Requirements** Unlike hot cathode gauges, which may suffer from filament degradation, the IKR-361 has no consumable elements that require frequent replacement, reducing operational downtime.

6. **Fast Response Time** The gauge provides quick pressure readings, which is beneficial in dynamic vacuum systems where rapid adjustments are necessary.

7. **Calibration Stability** Cold cathode gauges are less prone to drift over time compared to some other gauge types, provided they are properly installed and maintained.

8. **Compatibility with Control Systems** The IKR-361 can be interfaced with programmable logic controllers (PLCs) or data acquisition systems, making it suitable for automated processes.

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### **Cons**

1. **Limited Lower Pressure Range** While the IKR-361 excels in the UHV range, it may not be as sensitive as ionization gauges (e.g., Bayard-Alpert or Penning gauges) in the mid-vacuum or rough vacuum ranges (above 10 -3 mbar). For applications requiring measurements across a broader spectrum, additional gauges may be needed.

2. **Sensitivity to Gas Composition** Cold cathode gauges can exhibit sensitivity to the type of gas present in the vacuum chamber. Certain gases (e.g., reactive gases like oxygen or hydrogen) may affect accuracy or gauge lifespan, requiring calibration adjustments or compensation methods.

3. **Cost** The IKR-361 is a mid-to-high-end gauge, and its price may be prohibitive for small-scale or budget-conscious applications. While it offers excellent performance, the initial investment can be significant compared to simpler or less precise gauges.

4. **Installation and Alignment Requirements** Proper installation is critical for optimal performance. Misalignment or improper mounting can lead to inaccurate readings or reduced lifespan. This may require specialized knowledge or assistance from a technician.

5. **Potential for False Readings in Non-Ideal Conditions** In environments with strong electromagnetic fields, high levels of ionizing radiation, or significant outgassing, the gauge s readings may be compromised. Shielding or additional safeguards may be necessary.

6. **Limited Lifespan in Harsh Conditions** While durable, prolonged exposure to aggressive gases, high temperatures, or mechanical stress can degrade the gauge over time. Regular maintenance and monitoring are essential to ensure continued accuracy.

7. **Dependence on Calibration** Like all vacuum gauges, the IKR-361 requires periodic calibration to maintain accuracy. This adds to the long-term cost of ownership, as calibration services may need to be outsourced to certified labs.

8. **Learning Curve for Operation** Users unfamiliar with cold cathode gauges or vacuum systems may require training to interpret readings correctly and troubleshoot issues. Misuse can lead to inaccurate data or damage to the gauge.

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### **Conclusion**

The Pfeiffer VACUUMS IKR-361 is a high-performance inverted cathode gauge that excels in applications requiring precise pressure measurements in the UHV and HV ranges. Its durability, wide pressure range, and compatibility with Pfeiffer s ecosystem make it an excellent choice for industries such as semiconductor manufacturing, thin-film deposition, and surface science. However, its limitations such as sensitivity to gas composition, limited lower-range sensitivity, and higher cost must be carefully considered. If your application demands reliability, long-term stability, and high accuracy in specific pressure ranges, the IKR-361 is a strong recommendation. For applications requiring broader pressure coverage or simpler, lower-cost solutions, alternative gauges (e.g., ionization gauges or Pirani gauges) may be more appropriate.

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### **Recommendation**

**Buy the IKR-361 if:**

- You need a robust, long-lasting gauge for UHV or HV applications.

- Your system already uses Pfeiffer components, ensuring seamless integration.

- You prioritize accuracy and stability over a wide pressure range.

- You are willing to invest in calibration and maintenance to sustain performance.

**Avoid or consider alternatives if:**

- Your budget is constrained, and a lower-cost gauge (e.g., a basic cold cathode or ionization gauge) would suffice.

- You require precise measurements across a broader pressure spectrum (e.g., from rough vacuum to UHV), in which case a multi-gauge system may be necessary.

- Your environment includes aggressive gases or conditions that could degrade gauge performance over time without additional safeguards.

For most professional vacuum applications where UHV or HV precision is critical, the IKR-361 is a well-justified purchase. Pair it with proper installation, calibration, and maintenance protocols to maximize its lifespan and performance.

Details:

All crates made with 1/2 plywood and have foam runners as well very strong. All crates confirm to ISPM-15 and will comply with import guidelines in most countries. Specifications: 14.5. This Pfeiffer Vacuum IKR 361 Cold Cathode Gauge was kept as a good spare.

Info: CXA Labs.

specifications microscopepartzo:

  • brand: Pfeiffer Vacuum
  • mpn: Ikr-361
  • part type: Vacuum Gauge

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offer microscopepartzo:

  • started: May 8, 2026
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  • condition: Used
  • Medical/Lab Equipment Attachments Accessories > Microscope Parts Accessories > Other Microscope Parts Accessories

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  • rating: 100.0%
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part type: vacuum gauge,
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